The FMA3100/3300ST Series will precisely measure flow rates of virtually any clean, dry gas as low as 0.4 to 20 SCCM or as high as 10 to 500 SLPM, including hydrogen. Repeatable results are achieved by utilizing a thermal mass flow measurement sensor design. This proven design minimizes zero drift while maintaining fast response and linear outputs. Compression tube fittings provide fast gas connections and integrate well with existing tubing.
The FMA3200/3400ST Series flow controllers will precisely measure and control flow rates of virtually any clean, dry gas as low as 0.4 to 20 SCCM or as high as 0.2 to 10 LPM. The FMA3200/3400ST Series feature an integrated 3-digit display for flow rate monitoring right on the unit. Electrical connections are made via the included 1 m (3') cable. Either a mating cable (FMA3000C) or power adapter is required. See accessories below. The units are available with or without a display for a wide range of applications.
SPECIFICATIONS Accuracy/Linearity: ±10 to 100% of rated flow: 1.5% FS ±20 to 100% of rated flow: 3% FS for second and third gas selection on FMA3400ST Repeatability: ±0.25% FS Power Requirements: FMA3100ST: 12 to 15 Vdc @ 100 mA FMA3300ST: 12 to 15 Vdc @ 150 mA FMA3200ST: 12 to 15 Vdc @ 230 mA FMA3400ST: 12 to 15 Vdc @ 250 mA Pressure Rating: Overpressure limit is 10.2 bar (150 psig) Operating Temperature: 0 to 55°C (32 to 131°F), non-condensing Storage Temperature: 0 to 70°C (32 to 158°F) Temperature Sensitivity: ±0.15% FS or less per °C Wetted Materials: Stainless steel (303, 304, 316) and FKM O-rings Recommended Filtration: 10 microns Turndown Ratio: 50:1 Compatible Gases: Most clean, dry gases that are compatible with the wetted materials Outputs: Analog voltage output 0 to 5 Vdc; voltage level is proportional to flow rate (zero Vdc at zero flow); load connected to output should not be less than 2500 Ω Setpoint Input: FMA3200ST: Analog voltage input, 0 to 5 Vdc; voltage level is proportional to flow rate (0 Vdc at zero flow); input load approx 2 MΩ FMA3400ST: User-selectable internal or external External: Analog voltage input, 0 to 5 Vdc; voltage level is proportional to flow rate (zero Vdc at zero flow); input load approx 2 MΩ Internal: Front-panel adjustable with 2 trim pots, 1 coarse and 1 fine adjustment Flow Connections: Stainless steel fittings Electrical Connections: Integrated, 1 m (3'), 6-conductor cable, terminated with 6-pin male mini DIN connector (PS/2 style) Dimensions: FMA3100ST: 47.4 L x 26.2 W x 90.2 mm H (1.87 x 1.03 x 3.55") FMA3300ST: 47.4 L x 26.2 W x 127.0 mm H (1.87 x 1.03 x 5.0") FMA3200ST: 80.5 L x 26.2 W x 96.5 mm H (3.17 x 1.03 x 3.80") FMA3400ST: 80.5 L x 26.2 W x 133.6 mm H (3.17 x 1.03 x 5.26")